Crystallinity and Si-H Bonding Configuration of nc-Si:H Films Grown by Layer-by-layer (LBL) Deposition Technique at Different RF Power
Date
Authors
Goh Boon Tong
Saadah Abdul Rahman
Siti Meriam Ab. Gani
Journal Title
Journal ISSN
Volume Title
Publisher
Penerbit UKM
Abstract
Description
Keywords
Crystallite size, FTIR, nc-Si:H, XRD