Crystallinity and Si-H Bonding Configuration of nc-Si:H Films Grown by Layer-by-layer (LBL) Deposition Technique at Different RF Power

2024-10-212024-10-21https://repoemc.ukm.my/handle/123456789/17132Crystallite sizeFTIRnc-Si:HXRDCrystallinity and Si-H Bonding Configuration of nc-Si:H Films Grown by Layer-by-layer (LBL) Deposition Technique at Different RF PowerJournal Article