Fabrication of deep trenches in silicon wafer using deep reactive ion etching with aluminium mask

2024-10-212024-10-21https://repoemc.ukm.my/handle/123456789/15959Almaskdeep trenchdeep trenches ion etchingetch ratesilicon structureFabrication of deep trenches in silicon wafer using deep reactive ion etching with aluminium maskJournal Article