Fabrication of Silicon Oxide Nanodot Arrays by Scanning Probe Lithography

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dc.creatorKhatijah A. Yaacob
dc.creatorSabar D. Hutagalung
dc.creatorTeguh Darsono
dc.date2023-11-06T09:01:58Z
dc.date2023-11-06T09:01:58Z
dc.date2008
dc.date.accessioned2024-10-21T02:33:01Z
dc.date.available2024-10-21T02:33:01Z
dc.identifier0126-6039
dc.identifierukmvital:12553
dc.identifierhttps://ptsldigital.ukm.my//jspui/handle/123456789/587582
dc.identifierSiri Q1.S23
dc.identifier.urihttps://repoemc.ukm.my/handle/123456789/16247
dc.languageen
dc.publisherPenerbit UKM
dc.relationSains Malaysiana
dc.relationhttp://journalarticle.ukm.my,http://www.ukm.my/jsm/
dc.subjectAtomic force microscope
dc.subjectNanodot
dc.subjectScanning probe lithograpy
dc.subjectSilicon oxide
dc.subjectTip voltage
dc.titleFabrication of Silicon Oxide Nanodot Arrays by Scanning Probe Lithography
dc.typeJournal Article

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