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Research Data
PTSL UKM Journal Article
Statistical Design of Ultra-Thin SiO2 for Nanodevices
Statistical Design of Ultra-Thin SiO2 for Nanodevices
Date
Authors
Abul Fatah M.F.A
Ahmad I
Hashim.U
Journal Title
Journal ISSN
Volume Title
Publisher
Penerbit UKM
Abstract
Description
Keywords
CMOS
,
get dielektrik
,
get oksida ultranipis
,
kaedah taguchi
,
mikroskop daya atom AFM
Citation
URI
https://repoemc.ukm.my/handle/123456789/19338
Collections
PTSL UKM Journal Article
Full item page