Borophosphosilicate Glass (BPSG) Reflow Characterization for Submicron CMOS Technology : Pencirian Kaca Borophosphosilicat (BPSG) bagi Teknologi Submikron CMOS

Simple item page
dc.creatorNik Hazura N. Hamat
dc.creatorRamzan Mat Ayub
dc.creatorUda Hashim
dc.date2023-11-06T08:49:06Z
dc.date2023-11-06T08:49:06Z
dc.date2007
dc.date.accessioned2024-10-21T02:37:12Z
dc.date.available2024-10-21T02:37:12Z
dc.identifier0126-6039
dc.identifierukmvital:12115
dc.identifierhttps://ptsldigital.ukm.my//jspui/handle/123456789/587014
dc.identifierSiri Q1.S23
dc.identifier.urihttps://repoemc.ukm.my/handle/123456789/17605
dc.languageen
dc.publisherPenerbit UKM
dc.relationSains Malaysiana
dc.relationhttp://journalarticle.ukm.my,http://www.ukm.my/jsm/
dc.subjectBorophosphosilicate Glass
dc.subjectBPSG
dc.subjectCMOS Technology
dc.subjectTeknologi Submikron CMOS
dc.titleBorophosphosilicate Glass (BPSG) Reflow Characterization for Submicron CMOS Technology : Pencirian Kaca Borophosphosilicat (BPSG) bagi Teknologi Submikron CMOS
dc.typeJournal Article

Files

Collections

PTSL UKM Journal Article